This Recommended Practice describes best-practice procedures for performing accurate on-wafer calibrations, de-embedding and measurements at microwave, millimeter-wave and THz frequencies. Recommendations are given for designing and performing both accurate on-wafer calibrations in coplanar waveguide and microstrip lines fabricated directly on a user's wafer and off-wafer "probe-tip" working calibrations.
- Sponsor Committee
- MTT/SCC - Standards Coordinating Committee
- Status
- Active PAR
- PAR Approval
- 2019-09-05
Working Group Details
- Society
- IEEE Microwave Theory and Techniques Society
Learn More - Sponsor Committee
- MTT/SCC - Standards Coordinating Committee
- Working Group
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P2822 On_Wafer Measurements - Recommended Practice for Microwave, Millimeter-wave and THz On-Wafer Calibrations, De-Embedding and Measurement
Learn More - IEEE Program Manager
- Vanessa Lalitte
Contact - Working Group Chair
- Andrej Rumiantsev
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